Rapid Thermal Processing book cover

Rapid Thermal Processing

Science and Technology

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Published: April 1993

Imprint: Academic Press

ISBN: 978-0-12-247690-7


  • 1. Rapid Thermal Processing - A Justification2. Rapid Thermal Processing - Based Epitaxy3. Rapid Thermal Growth and Processing of Dielectrics4. Thin-Films Deposition5. Extended Defects from Ion Implantation and Annealing6. Junction Formation in Silicon by Rapid Thermal Annealing7. Silicides8. Issues in Manufacturing Unique Silicon Devices Using Rapid Thermal Annealing9. Manufacturing Equipment Issues in Rapid Thermal ProcessingIndex


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