Plasma Deposition of Amorphous Silicon-Based MaterialsEdited By
- Pio Capezzuto, Centro di Studio per la Chimica dei Plasmi, CNR
- Arun Madan, MV Systems, Inc.
The audience includes plasma physicists, electrical engineers, materials scientists, plasma chemists, and condensed matter physicists in industry and academia.
Hardbound, 324 pages
Published: September 1995
Imprint: Academic Press
"The book...provides a very useful outline of the underlying properties, processes as well as their applications."