Organometallic Vapor-Phase Epitaxy
Theory and Practice
- Gerald Stringfellow, University of Utah, Salt Lake City, U.S.A.
This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices.
Graduate students and upper level undergraduates planning to pursue a career in research, development, or production of materials, structures, and devices using the OMVPE technique.