Organometallic Vapor-Phase Epitaxy

Theory and Practice

By

  • Gerald Stringfellow, University of Utah, Salt Lake City, U.S.A.

This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices.
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Audience

Graduate students and upper level undergraduates planning to pursue a career in research, development, or production of materials, structures, and devices using the OMVPE technique.

 

Book information

  • Published: December 1998
  • Imprint: ACADEMIC PRESS
  • ISBN: 978-0-12-673842-1


Table of Contents

Overview of the OMVPE Process. Thermodynamics. Physical Processes Occurring on the Surface. Source Molecules. Kinetics. Hydrodynamics and Mass Transport. Design of the OMVPE Process. Specific Materials. Superlattice Structures. Devices.