Microfabrication for Industrial Applications


  • Regina Luttge, Eindhoven University of Technology, Eindhoven, Netherlands

This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.
Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.
Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.
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Engineers in industry and at schools / universities; polytechnical students.


Book information

  • Published: September 2011
  • ISBN: 978-0-8155-1582-1

Table of Contents

1. Introduction reasons for miniaturisation micro and nanofabrication through the ages (microcomponents and assembly versus monolithic approach) overview of industrial fields of application2. Microsystems technology philosophy of micro/nanofabrication for integrated circuit industry top-down approach to sub-micron feature manufacture thin film deposition processing of semiconductor materials (doping, oxidation, RTA, metallisation, SOI, etc.) processing of waveguide materials processing of plastic materials packaging and interconnects the stress issue: thin film residual stress, stress issues in packaging and interconnection economical aspects of semiconductor manufacture environmental aspects of semiconductor manufacture3. Nanotechnology top-down or bottom up nanostructures fabricated with beams nano imprinting methods manufacturing nanoparticles health aspects of nanoparticles how to analyse nanofeatures? connecting nano to micro to macro quo vadis?4. Microsystems for Information Technology data recording (camera, microphone) data storage (memories, CD's) data (tele) communication computing displays (beamers, LCD, TFT)5. Micro and nanomechanical sensors and actuators application fields materials and methods, general overview silicon as a mechanical material silicon micromachining: process tolerances and large-scale manufacturability testing and assembly integration and interconnection temperature monitoring and control reliability issues case studies: pressure and acceleration sensors, resonators / rf-MEMS, scanning probes (AFM etc.) smart materials: what is a "smart material," overview of materials for actuation and detection fabrication and properties of piezoelectric microstructures fabrication and properties of magnetic microstructure other smart materials and their manufacturability, e.g. functional polymers micro- and nanotransducer systems6. Sensors for chemical and medical applications application fields materials and methods surface modification methods spotting techniques nanostructures and nanoparticles testing, assembly and interfacing; reliability issues7. Microfluidic systems mini-, micro- and nanofluidics: what are they and why are they of interest? application fields physics of fluids in micro- and nanochannels silicon, glass or plastics? temperature monitoring and control integration and interconnection testing and assembly; reliability issues case studies: transdermal medical systems, micropumps, microvalves, inkjets, DNA-analysis, lab-on-a-chip, micro-cooling8. Micro and nanotechnology for sustainable energy solar cells based on semiconductors future developments in solar energy: nanoparticles microbatteries and micro fuel cells microreactors for sustainable energy reliability issues alternative energy sources based on micro- and nanotechnology