Materials Science in Microelectronics II

The effects of structure on properties in thin films


  • Eugene Machlin, Columbia University , New York, USA

The subject matter of thin-films – which play a key role in microelectronics – divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: • Electrical properties• Magnetic properties• Optical properties• Mechanical properties• Mass transport properties• Interface and junction properties• Defects and properties
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An ideal reference for students and researchers in material science, who need to learn the basics of thin films.


Book information

  • Published: November 2005
  • Imprint: ELSEVIER
  • ISBN: 978-0-08-044639-4