Thin Film Processes and LithographyEdited by
- Daniel Ehrlich, MIT--Lincoln Laboratory
- Jeffrey Tsao, Sandia National Laboratories
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
Researchers in semiconductor/thin-film processing and laser chemistry and electrical engineers in the areas of device fabrication and lithography and students in these areas.
Hardbound, 587 Pages
Published: June 1989
Imprint: Academic Press
A good balance between science and practice, well-established and very new data....The importance of this monograph lies in the title itself, since microelectronics today is a driving force of progress in science and technology....I think that anyone who wants to understand this field of practical laser chemistry should have a copy. It is also useful to study because it raises many new questions about elementary laser-induced reactions on surfaces and thereby stimulates progress in the field.
--VLADILEN S. LETOKHOV, PROFESSOR AND HEAD OF DEPARTMENT, INSTITUTE OF SPECTROSCOPY OF USSR ACADEMY OF SCIENCES, TROITZK. IN OPTICS AND PHOTONICS NEWS.
Laser Microfabrication' is an impressive volume detailing the expanding field of laser-assisted patterned chemical processing of surfaces. This volume would be a valuable addition to the library of any researcher in laser-assisted microfabrication. It would also serve as an excellent introduction to the field for those with minimal background in lasers, thin-film processing,, and lithography.
With contributions from 16 experts in this country and the United Kingdom, this book contains a great wealth of information, covering the wide field of laser microfabrication processes....delightful and informative reading. It should be useful for both starting students and active researchers, as the editors state in the preface.
--JOURNAL OF SPIE
This text provides a comprehensive introduction to the field of laser microchemical processing. It is largely tutorial in nature covering everything from optics to chemical reaction kinetics to actual semiconductor processing applications. It contains references to much of the original work and thus not only brings the reader up to date on current research but gives perspective to the field in general. As such, this book should be valuable not only to the newcomer to this research, but should also be useful to the oldtimer....It is obvious that the editors worked very hard, not only to put together a coherent presentation of this subject but to make it comprehensive as well.
--NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH
informative reference source....There are good figures and tables and all the references include the titles of the articles. I recommend this book as an expert, up-to-date account of its field for persons interested in laser interactions with solid surfaces both on the fundamental level and in obtaining details of microfabrication technology.
The fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past years is reviewed in a convenient format, which serves as a starting point for students and researchers to learn about the field. Laser Microfabrication provides a good reference to work already done and to the major problems remaining to be solved. Laser engineers should benefit from the information if they are attempting to develop products for this industry. Semiconductor engineers will find the information valuable if they want to be involved in state-of-the-art microfabrication processes.
--LASER FOCUS WORLD
- Technology. Y.S. Liu, Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography. Fundamentals. T.J. Chuang, Laser-Stimulated Molecular Processes on Surfaces. M. Rothschild, Spectroscopy and Photochemistry of Gases, Adsorbates, and Liquids. C.I.H. Ashby and J.Y. Tsao, Photophysics and Thermophysics of Light Absorption and Energy Transport in Solids. H.J. Zeiger, D.J. Ehrlich, and J.Y. Tsao, Transport and Kinetics. Reactions. J.J. Ritsko, Laser Etching. R.L. Jackson, T.H. Baum, T.T. Kodas, D.J. Ehrlich, and P.B. Comita, Laser Deposition: Energetics and Chemical Kinetics. J. Haigh and M.R. Aylett, Laser Deposition: Experimental Approaches. S.J.C. Irvine, Epitaxy. I.W. Boyd, Doping and Oxidation. Index.