Thin Film Processes and Lithography
- Daniel Ehrlich, MIT--Lincoln Laboratory
- Jeffrey Tsao, Sandia National Laboratories
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
Researchers in semiconductor/thin-film processing and laser chemistry and electrical engineers in the areas of device fabrication and lithography and students in these areas.