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Ionized Physical Vapor Deposition, 27

• Ronald Powell, Novellus Systems, Inc., Palo Alto, California
• Abraham Ulman, Polytechnic University, Brooklyn, New York

Audience
R&D scientists (p) in the microelectronics industry Integrated circuit process engineers (p) Materials scientists (p) Graduate students (s) in electrical engineering, materials science, applied physics, and chemistry Educators (s)