Handbook of VLSI Microlithography
Principles, Technology and ApplicationsEdited by
- William B. Glendinning, Motorola, USA
- John N. Helbert, Motorola, USA
For workers in the Very Large Scale Integrated Circuit (VLSI) industry involved with production of high density integrated circuit semiconductors such as DRAM--including production engineers, research and development scientists and technicians as well as academics.
Hardbound, 671 Pages
Published: January 1991
Imprint: William Andrew