Handbook of Thin Films, Five-Volume Set book cover

Handbook of Thin Films, Five-Volume Set

This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures.Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices.Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

Audience
Researchers dealing with electronic materials, fabrication, and characterization.

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Imprint: Academic Press

ISBN: 978-0-12-512908-4

Contents

  • Volume 1 Deposition and Processing
    1 Methods of deposition of hydrogenated amorphous silicon for device applications
    2 Atomic Layer Deposition
    3 Laser Applications in Transparent Conducting Oxide Thin Film Processing
    4 Cold Plasma Processing in Surface Science and Technology
    5 Electrochemical Formation of Thin Films of Binary III-V Compounds
    6 Nucleation, Growth and Crystallization of Thin Films
    7 Ion Implant Doping and Isolation of GaN and Related Materials
    8 Plasma Etching of GaN and Related Materials
    9 Residual Stresses in Physically Vapor Deposited Thin Films
    10 Langmuir-Blodgett Films of Biological Molecules
    11 Structure Formation During Electrocrystallization of Metal Films
    12 Epitaxial Thin Films of Intermetallic Compounds
    13 Pulsed Laser Deposition of Thin Films: Expectations and Reality
    14 b"-Alumina Single-Crystal Films

    Volume 2 Characterization and Spectroscopy
    1 Classification of Cluster Morphologies
    2 The Band Structure and Orientations of Molecular Adsorbates on Surfaces by Angle-Resolved Electron Spectroscopies
    3 Superhard Thin Film Coatings in C-B-N Systems: Growth and Characterization
    4 ATR Spectroscopy of Thin Films
    5 Ion Beam Characterization in Superlattices6 In-situ Real Time Spectroscopic Ellipsometry Studies: Carbon-based Materials and Metallic TiNx Thin Films Growth
    7 In Situ Faraday-Modulated Fast-Nulling Single-Wavelength Ellipsometry of the Growth of Semiconductor, Dielectric and Metal Thin Films
    8 Photocurrent Spectroscopy of Thin Passive Films
    9 Electron Energy Loss Spectroscopy for Surface Study
    10 Theory of Low-energy Electron Diffraction and Photoelectron Spectroscopy from Ultra-thin Films
    11 In situ Synchrotron Structural Studies of the Growth of Oxides and Metals
    12 Operator Formalism in Polarization Nonlinear Optics and Spectroscopy of Polarization Inhomogeneous Media
    13 Secondary Ion Mass Spectrometry (SIMS) and its Application to Thin Films Characterization
    14 A Solid State Approach to Langmuir Monolayers, Their Phases, Phase Transitions and Design
    15 Solid State NMR of Biomolecules

    Volume 3 Ferroelectric and Dielectric Thin Films
    1 Electrical Properties of High Dielectric Constant and Ferroelectric Thin Films for Very Large Scale Integration (VLSI) Integrated Circuits
    2 High Permittivity (Ba, Sr)TiO3 Thin Films
    3 Ultrathin Gate Dielectric Films for Si-Based Microelectronic Devices
    4 Piezoelectric Thin Films: Processing and Properties
    5 Fabrication and Characterization of Ferroelectric Oxide Thin Films
    6 Ferroelectric Thin Films of Modified Lead Titanate
    7 Point Defects in Thin Insulating Films of Lithium Fluoride for Optical Microsystems
    8 Polarization Switching of Ferroelectric Crystals
    9 High Temperature Superconductor and Ferroelectric Thin Films for Microwave Applications
    10 Twinning in Ferroelectric Thin Films: Theory and Structural Analysis
    11 Ferroelectric Polymers Langmuir-Blodgett Films
    12 Optical Properties of Dielectric and Semiconductor Thin Films

    Volume 4 Semiconductor and Superconducting Thin Films
    1 Electrochemical Passivation of Si and SiGe Surfaces
    2 Epitaxial Growth and Structure of III-V Nitride Thin Films
    3 Optical Properties of Highly Excited (Al, In) GaN Epilayers and Heterostructures
    4 Electrical Conduction Properties of Thin Films of Cadmium Compounds
    5 Carbon Containing Heteroepitaxial Silicon and Silicon/Germanium Thin Films on Si(001)
    6 Low Frequency Noise Spectroscopy for Characterization of Polycrystalline Semiconducting Thin Films and Polysilicon Thin Film Transistors
    7 Germanium Thin Films on Silicon for Detection of Near-Infrared Light
    8 Physical Properties of Amorphous Gallium Arsenide
    9 Amorphous Carbon Thin Films
    10 High-Tc Superconducting Thin Films
    11 Electronic and Optical Properties of Strained Semiconductor Films of Group V and III-V Materials
    12 Growth Structure and Properties of Plasma-Deposited Amorphous Hydrogenated Carbon-Nitrogen Films
    13 Conductive Metal Oxide Thin Films

    Volume 5 Magnetic Thin Films
    1 Nanoimprinting Techniques
    2 The Energy Gap of Clusters, Nanoparticles and Quantum Dots
    3 Electronic States In GaAs-AlAs Short-period Superlattices: Energy Levels and Symmetry
    4 Spin Waves in Thin Films, Multi-Layers, and Superlattices
    5 Quantum Well Interference in Double Quantum Wells
    6 Electro-optical and Transport Properties of Quasi-Two-Dimensional Nanostructured Materials
    7 Magnetism of Nanoscale Composite Films
    8 Thin Magnetic Films
    9 Magnetotransport Effects in Semiconductors
    10 Thin Films for High Density Magnetic Recording
    11 Nuclear Resonance in Magnetic Thin Films and Multilayers12 Magnetic Characterization of Superconducting Thin Films

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