Handbook of Thin Film Deposition
- Krishna Seshan, was formerly Assistant Professor in Materials Science at the University of Arizona and has extensive professional experience as a technologist with both the IBM and Intel Corporations.
New third edition of the popular book on deposition. Aimed at engineers, technicians, and plant personnel in the semiconductor and related industries.
- Published: June 2012
- Imprint: WILLIAM ANDREW
- ISBN: 978-1-4377-7873-1
Table of Contents
Foreword to the Third Edition
Scaling of Devices and Thermal Scaling
PVD - Special Topics
CVD New Developments
CMP Method and Practice
Process Technology for Copper Interconnects
Optical Thin Films
Thin Films in Photovoltaics
Thin Films in Memory Applications