Handbook of Sputter Deposition Technology
Principles, Technology and Applications
By- Kiyotaka Wasa, Matsushita Electric, Ltd. and Yokohama City University, Japan
- Shigeru Hayakawa
A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
Audience
Electronics and materials engineers in the automotive, medical, semiconductors, space, plastics, and military industries.
Hardbound, 316 Pages
Published: December 1992
Imprint: William Andrew
ISBN: 978-0-8155-1280-6
Reviews
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"àcomprehensively covers state-of-the-art sputtering techniques and equipmentàthoroughly addresses all fundamental aspects." - Materials and Processing Report
Contents
- Thin Film Materials and DevicesThin Film ProcessesSputtering PhenomenaSputtering SystemsDeposition of Compound Thin FilmsMicrofabrication by SputteringFuture Directions
