Handbook of Quality Integrated Circuit Manufacturing
Process engineers, wafer fabrication managers, engineers, and technicians.
- Published: February 1991
- Imprint: ACADEMIC PRESS
- ISBN: 978-0-12-781870-2
Table of ContentsOverview of Semiconductor Manufacturing. Yield Optimization. Methods of Semiconductor Analysis. Cleanroom Facilities and Procedures. Wafer Cleaning Techniques. Photolithography and Etch Processes. The Diffusion Processes. Low Pressure Chemical Vapor Deposition Processes. Ion Implantation Processes. Metal Film Processes. Integrated Circuit Testing and Analysis. Statistical Quality Control. The People Who Make the Chips. Future Trends and Conclusions. Hazardous Chemical Toxicity Table. Experiment Design for Process and Product Development. Index