Handbook of Physical Vapor Deposition (PVD) ProcessingBy
- Donald M. Mattox
Engineers, including surface engineering personnel, technicians, and other plant personnel in process industries such as semiconductors and microelectronics. Especially informative for those new to the field.
Hardbound, 792 Pages
Published: April 2010
Imprint: William Andrew
"In addition to background theory and principles, this handbook is loaded with extensive practical information on vitually all aspects of PVD. It also has extensive listings of references, tabulated data, graphs, illustrations, and schematics - all of which greatly enhance the book and provide useful information. This handbook will be a frequented referenced book by those researchers using PVD."--Electrical Engineering