Handbook of Physical Vapor Deposition (PVD) ProcessingBy
- Donald M. Mattox
Engineers, including surface engineering personnel, technicians, and other plant personnel in process industries such as semiconductors and microelectronics. Especially informative for those new to the field.
Published: December 1998
Imprint: William Andrew
If you are new to PVD as I am, you will find this book to be well worth the money. - Amazon.com Review