Handbook of Ellipsometry

Edited by

  • Harland Tompkins, Independent consultant with ties to American Vacuum Society.
  • Eugene A Irene, University of North Carolina, Chapel Hill, USA


  • Harland Tompkins, Independent consultant with ties to American Vacuum Society.
  • Eugene A Irene, University of North Carolina, Chapel Hill, USA

The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
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International scientific and instrumentation communities concerned with thin films, spectroscopic ellipsometry, optical measurement, proteomics (protein chip technology in genomics); theory and applications in thin films materials science including semiconductors.


Book information

  • Published: January 2005
  • ISBN: 978-0-8155-1499-2

Table of Contents

PART 1: THEORY OF ELLIPSOMETRY1. Polarized Light and Ellipsometry Josef Humlfcek 1.1 A quick guide to ellipsometry 1.2 Maxwell and wave equations 1.3 Representations of polarization 1.4 Propagation of polarized light 1.5 Reflection and transmission of polarized light at planar interfaces 1.6 References 2. Optical Physics of Materials Robert W. Collins 2.1 Introduction 2.2 Propagation of light in solids 2.3 Classical theories of the optical properties of solids 2.4 Quantum mechanical theories of the optical properties of solids 2.5 Modeling the optical properties of solids 2.6 Overview and concluding remarks 2.7 References and bibliography 3. Data Analysis for Spectroscopic Ellipsometry Gerald E. Jellison, Jr. 3.1 Introduction 3.2 Ellipsometry parameters 3.3 Calculation of complex reflection coefficients 3.4 Models for dielectric functions 3.5 Fitting models to data 3.6 Determination of optical functions from spectroscopic ellipsometry data 3.7 Depolarization 3.8 Further reading and references PART 2: INSTRUMENTATION4. Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer Harland G. Tompkins 4.1 General 4.2 The components 4.3 Ellipsometer component configurations 4.4 References 5. Rotating Polarizer and Analyzer Ellipsometry Robert W. Collins, Ilsin An, Chi Chen 5.1 Introduction 5.2 Comparison of ellipsometers 5.3 Instrumentation issues 5.4 Data reduction for the rotating polarizer and analyzer ellipsometers 5.5 Precision considerations 5.6 Calibration procedures 5.7 Summary: recent and future directions6. Polarization Modulation Ellipsometry Gerald E. Jellison, Jr., Frank A. Modine 6.1 Introduction 6.2 The photoelastic modulator (PEM) 6.3 Experimental configurations of polarization modulation ellipsometers 6.4 Light intensity through a polarization modulation ellipsometer 6.5 Waveform analysis 6.6 Calibration procedures 6.7 Errors 6.8 Further reading and references 7. Multichannel Ellipsometry Robert W. Collins, Ilsin An, Joungchel Lee, Juan A. Zapien 7.1 Introduction 7.2 Overview of instrumentation 7.3 Rotating element designs 7.4 Concluding remarks 7.5 References PART 3: APPLICATIONS8. SiO2 Films Eugene A. Irene 8.1 Introduction 8.2 Historical perspective├╣prior to 1970 8.3 Modern studies├╣since 1970 8.4 Conclusions 8.5 References 9. Theory and Application of Generalized Ellipsometry Mathias Schubert 9.1 Introduction 9.2 The generalized ellipsometry concept 9.3 Theory of generalized ellipsometry 9.4 Special generalized ellipsometry solutions 9.5 Strategies in generalized ellipsometry 9.6 Generalized ellipsometry applications 9.7 Conclusions 9.8 Further reading and references PART 4: EMERGING AREAS10. VUV Ellipsometry James N. Hilfiker 10.1 Introduction 10.2 Historical review of short wavelength ellipsometry 10.3 VUV ellipsometry today 10.4 Importance of VUV ellipsometry 10.5 Survey of applications 10.6 Future of VUV ellipsometry 10.7 Acknowledgments 10.8 References 11. Spectroscopic Infrared Ellipsometry Arnulf R├Ěseler 11.1 Introduction 11.2 Experimental tools 11.3 Applications 11.4 References 12. Ellipsometry in Life Sciences Hans Arwin 12.1 Introduction 12.2 Historical background 12.3 The interfaces under study 12.4 From optics to biology 12.5 Methodology for data evaluation 12.6 Methodology├╣experimental 12.7 Applications 12.8 Outlook 12.9 References Index