Fundamental Principles of Engineering Nanometrology
- Richard Leach, National Physical Laboratory, UK
The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met.
Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology.
AudienceEngineers and scientists involved in micro- and nanomanufacturing and other nanotechnology areas; students and academics in micro- and nanotechnology.
- Published: June 2014
- Imprint: WILLIAM ANDREW
- ISBN: 978-1-4557-7753-2
Table of Contents
1. Introduction to metrology for micro- and nanotechnology
2. Some basics of measurement
3. Precision measurement instrumentation - some design principles
4. Length traceability using interferometry
5. Displacement measurement
6. Surface topography measurement instrumentation
7. Scanning probe and particle beam microscopy
8. Surface topography characterization
9. Co-ordinate metrology
10. Mass and force measurement