Fundamental Principles of Engineering Nanometrology book cover

Fundamental Principles of Engineering Nanometrology

The principles of engineering metrology applied to the micro- and nanoscale: essential reading for all scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale.

The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up.

In this book Professor Richard Leach, of the UK’s National Physical Laboratory (NPL) makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialisation of nanotechnology and measurement processes requiring accuracy at the nanoscale.

Key topics covered include:

  • Basic metrological terminology, and the highly important topic of measurement uncertainty.
  • Instrumentation, including an introduction to the laser
  • Measurement of length using optical interferometry, including gauge block interferometry
  • Displacement measurement and sensors
  • Surface texture measurement, stylus, optical and scanning probe instruments, calibration, profile and areal characterisation
  • Coordinate metrology
  • Low mass and force metrology

About the Author

Professor Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Engineering Measurement Division at the National Physical Laboratory (NPL), UK.

Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers

Hardbound, 352 Pages

Published: September 2009

Imprint: William Andrew

ISBN: 978-0-08-096454-6


  • Introduction to metrology for micro- and nanotechnology; Some basics of measurement;  Precision measurement instrumentation - some design principles; Length traceability using interferometry; Displacement measurement; Surface topography measurement instrumentation; Scanning probe and particle beam microscopy; Surface topography characterisation; Co-ordinate metrology; Mass and force measurement; References; Appendix A SI units of measurement and their realisation at NPL; Appendix B SI derived units


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