Fundamental Principles of Engineering Nanometrology


  • Richard Leach, National Physical Laboratory, UK
  • Richard Leach, National Physical Laboratory, UK

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.
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Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers


Book information

  • Published: September 2009
  • ISBN: 978-0-08-096454-6

Table of Contents

  1. Introduction to metrology for micro- and nanotechnology
  2. Some basics of measurement
  3. Precision measurement instrumentation - some design principles
  4. Length traceability using interferometry
  5. Displacement measurement
  6. Surface topography measurement instrumentation
  7. Scanning probe and particle beam microscopy
  8. Surface topography characterisation
  9. Co-ordinate metrology
  10. Mass and force measurement

ReferencesAppendix A: SI units of measurement and their realisation at NPLAppendix B: SI derived units