Fundamental Principles of Engineering Nanometrology book cover

Fundamental Principles of Engineering Nanometrology

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers

Hardbound, 352 Pages

Published: September 2009

Imprint: William Andrew

ISBN: 978-0-08-096454-6


    1. Introduction to metrology for micro- and nanotechnology
    2. Some basics of measurement
    3. Precision measurement instrumentation - some design principles
    4. Length traceability using interferometry
    5. Displacement measurement
    6. Surface topography measurement instrumentation
    7. Scanning probe and particle beam microscopy
    8. Surface topography characterisation
    9. Co-ordinate metrology
    10. Mass and force measurement

    ReferencesAppendix A: SI units of measurement and their realisation at NPLAppendix B: SI derived units


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