Fabrication & Design of Resonant MicrodevicesBy
- Behraad Bahreyni, Cambridge University, UK
Engineers in the field of micromachining, the design of resonant devices, MEMS, or sensor design.
Hardbound, 250 Pages
Published: September 2008
Imprint: William Andrew
- Introduction; Microfabrication; Actuation mechanisms; Sensing techniques; Modeling; Damping mechanisms; Interfacing; Noise; Packaging; Survey of applications