Fabrication & Design of Resonant Microdevices
By- Behraad Bahreyni, Cambridge University, UK
Audience
Engineers in the field of micromachining, the design of resonant devices, MEMS, or sensor design.
Hardbound, 250 Pages
Published: September 2008
Imprint: William Andrew
ISBN: 978-0-8155-1577-7
Contents
- Introduction; Microfabrication; Actuation mechanisms; Sensing techniques; Modeling; Damping mechanisms; Interfacing; Noise; Packaging; Survey of applications
