Electrochemistry of Semiconductors and Electronics
Processes and DevicesBy
- John McHardy
- Frank Haber
This book is an in-depth review of the electrochemistry of semiconductors and electronic devices. For in the relentless pursuit of faster, more compact devices the limits of materials science are probed, setting ever higher goals for semiconductor purity, crystal uniformity and circuit density. This book reviews and describes possible electrochemical avenues toward each of these goals.
Engineers and scientists in the semiconductor and microelectronics industries.
Hardbound, 374 Pages
Published: December 1992
Imprint: William Andrew
- 1. Electrochemical Deposition of Semiconductors 1.0 Introduction 2.0 Theory 3.0 Elemental Semiconductors 4.0 Compound Semiconductors 5.0 Conclusion 6.0 References2. Chemical Etching: Principles and Applications 1.0 Introduction 2.0 Mechanism of Dissolution 3.0 Mechanism of Selective Etching 4.0 Composition of Etching and Polishing Solutions 5.0 Photoetching 6.0 Electrolytic Etching and Polishing 7.0 Gas-Phase Chemical Etching 8.0 Morphology of Chemical Etch Pits 9.0 Correspondence Between Etch Figures and Dislocations 10.0 Etching Profiles 11.0 Acknowledgement 12.0 References3. Electrochemical Passivation of (Hg, Cd)Te 1.0 Introduction 2.0 Anodic Oxidation 3.0 Alternative Passivation Processes 4.0 References4. Photoelectrochemical Processing of Semiconductors 1.0 Introduction 2.0 Experimental Procedures 3.0 Photoelectrochemical Etching 4.0 Photoelectrochemical Deposition 5.0 Photoelectrochemical Surface Processing 6.0 Conclusion 7.0 Acknowledgement 8.0 References5. Photoelectrochemical Characterization 1.0 Introduction 2.0 Direct Response 3.0 Electric Field Modulation of System's Response 4.0 Time Resolved Techniques 5.0 Photothermal Methods 6.0 Topographical Studies 7.0 Acknowledgement 8.0 References6. Electrochemical Migration 1.0 Introduction 2.0 Model 3.0 Experimental 4.0 Discussion 5.0 Summary 6.0 Acknowledgement 7.0 References7. Electrochemical Capacitors 1.0 Introduction 2.0 Mechanisms of Charge Storage at the Electro-Chemical Interface 3.0 Dynamic Behavior of Electrochemical Capacitors 4.0 Carbon Electrochemical Capacitors 5.0 Transition and Noble Metal Oxide Capacitors 6.0 Conducting Polymers 7.0 Conclusions 8.0 Acknowledgements 9.0 References Index