Confocal Scanning Optical Microscopy and Related Imaging Systems
- Gordon Kino, Stanford University
- Timothy Corle, National Applied Science
This book provides a comprehensive introduction to the field of scanning optical microscopy for scientists and engineers. The book concentrates mainly on two instruments: the Confocal Scanning Optical Microscope (CSOM), and the Optical Interference Microscope (OIM). A comprehensive discussion of the theory and design of the Near-Field Scanning Optical Microscope (NSOM) is also given.The text discusses the practical aspects of building a confocal scanning optical microscope or optical interference microscope, and the applications of these microscopes to phase imaging, biological imaging, and semiconductor inspection and metrology.A comprehensive theoretical discussion of the depth and transverse resolution is given with emphasis placed on the practical results of the theoretical calculations and how these can be used to help understand the operation of these microscopes.View full description
Optical scientists, engineers, materials scientists, semiconductor testing engineers, biologists in testing instrumentation, and graduate students in these areas.
- Published: August 1996
- Imprint: ACADEMIC PRESS
- ISBN: 978-0-12-408750-7
Table of ContentsIntroduction. Instruments. Depth and Transverse Resolution. Phase Imaging. Applications. Appendix A: Vector Field Theory for Depth and Transverse Resolution of a CSOM.