Code Compliance for Advanced Technology Facilities

A Comprehensive Guide for Semiconductor and other Hazardous Occupancies


  • William R. Acorn, Acorn Consulting Services, USA

Facilities which utilize hazardous liquids and gases represent a significant potential liability to the owner, operator, and general public in terms of personnel safety and preservation of assets. It is obvious that a catastrophic incident or loss of property or personnel is to be avoided at all costs. This book was conceived to give the reader a guide to understanding the requirements of the various codes and regulations that apply to the design, construction, and operation of facilities utilizing hazardous materials in their processes.
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Facilities which utilize hazardous liquids and gases.


Book information

  • Published: December 1994
  • ISBN: 978-0-8155-1338-4

Table of Contents

1. Introduction to Codes 1.1 History of the Hazardous Occupancy Codes 1.2 Overview of Applicable Codes 1.3 Overview of Uniform Building Code 1.4 Overview of Uniform Fire Code 1.5 Occupancy Classifications of Proposed Facilities 1.6 Retrofit and Renovation 1.7 Understanding Code Intent & Philosophy 1.8 Insurance Carrier Requirements 1.9 Designer/Building Official/Owner Relationship and Liabilities 1.10 Integrated Approach Chapter Summary2. Architectural Issues 2.1 General 2.2 Renovation 2.3 Occupancy Classification 2.4 Allowable Area and Separations 2.5 Location 2.6 Exiting 2.7 Allowable Fabrication Area (H-6) 2.8 Multi-Level Fab Concept (H-6) 2.9 Corridors 2.10 Chemical Storage Chapter Summary3. Hazardous Materials Storage and Handling 3.1 Introduction 3.2 Hazardous Materials 3.3 Maximum Allowable Quantities of HPMs 3.4 Transportation of HPMs 3.5 Control Areas 3.6 Hazardous Material Storage Rooms 3.7 Hazardous Material Dispensing, Use and Handling 3.8 HPM Piping Systems 3.9 Code Citations Chapter Summary4. Mechanical Heating, Ventilating and Air Conditioning Systems 4.1 General 4.2 Recirculating Air Handling Systems 4.3 Exhaust Ventilation and Operation 4.4 Make-Up Air Systems 4.5 Emergency Ventilation and Operation 4.6 Exhaust Treatment and Separation of Reactive Materials 4.7 Air Handling System Isolation 4.8 Smoke and Fire Barriers 4.9 Temperature Control Chapter Summary5. Fire Suppression 5.1 General 5.2 Revisions and Upgrades 5.3 H-6 Occupancies 5.4 Storage Occupancies 5.5 Exhaust Ducts Containing Flammable Vapors 5.6 Exhaust Ducts Containing Corrosive Vapors 5.7 Gas Cabinets 5.8 Exit Corridors 5.9 Service Corridors 5.10 Alternate Suppression Systems 5.11 Zoning Chapter Summary6. Electrical 6.1 Electrical Power Systems 6.2 Design Considerations 6.3 Emergency Shut Offs 6.4 Hazardous Area Electrical Requirements Chapter Summary7. Life Safety Alarm and Monitoring Systems 7.1 Introduction 7.2 Emergency Control Station (ECS) 7.3 Alarm and Monitoring Systems 7.4 Continuous Toxic Gas Monitoring 7.5 Emergency Spill Alarm 7.6 Audible Alarm Evacuation 7.7 Visual Alarm Signaling 7.8 Fireman's Command Station 7.9 Miscellaneous Equipment 7.10 Head End Equipment 7.11 Wiring Chapter Summary8. Retrofit and Renovation of Wafer Fabs to Comply with Hazardous Occupancy Codes 8.1 Introduction 8.2 Code Agency Liaison 8.3 Prioritizing Code Compliance Issues 8.4 Project Phasing Chapter Summary9. Uniform Building Code Definitions and Abbreviations10. Uniform Fire Code Definitions and Abbreviations