A User

A User's Guide to Ellipsometry

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Audience
Technologists, physicists, engineers, material scientists, and analytical chemists studying solid state devices, surfaces, thin films, integrated circuit manufacturing and development, and corrosion science. Students talking Tompkin's ellipsometry short course as sponsored by the AVS.

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Published: October 1992

Imprint: Academic Press

ISBN: 978-0-12-693950-7

Contents

  • Theoretical Aspects. Instrumentation. Using Optical Parameters to Determine Material Properties. Determining Optical Parameters for Inaccessible Substrates and Unknown Films. Extremely Thin Films. The Special Case of Polysilicon. The Effect of Roughness. Case Studies. Chapter References. Appendices. Index.

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